People Research








Facilities available to our group include our 500 sq. ft. laboratory on the first floor of the Seeley W. Mudd building, used for experimentation, polymeric and other fabrication, and office space.  Our primary microfabrication area is the Columbia University Clean Room, located within the Center for Engineering and Physical Sciences Research and jointly supported by the Nanoscale Science and Engineering Center (NSEC) and the Materials Research Science and Engineering Center (MRSEC).



This 3,000 sq. ft. state of the art facility includes two dedicated lithography rooms, with wet chemical etching bays and lithography equipment capable of producing 50 nanometer size features.  This is complemented by all types of deposition equipment; such as thermal evaporators, electron-beam evaporators, a sputtering unit, chemical vapor deposition, and an atomic monolayer deposition system.  Analytical and measurement tools include a profilometer and ellipsometer, and optical and electron microscopes.  More information can be found on the clean room website: