People | Research |
Facilities |
Facilities
available to our group include our 500 sq. ft. laboratory on the first
floor of the Seeley W. Mudd building, used for experimentation, polymeric
and other fabrication, and office space. Our primary microfabrication area
is the Columbia University Clean Room, located within the Center for
Engineering and Physical Sciences Research and jointly supported by the
Nanoscale Science and Engineering Center (NSEC) and the Materials Research
Science and Engineering Center (MRSEC). This
3,000 sq. ft. state of the art facility includes two dedicated lithography
rooms, with wet chemical etching bays and lithography equipment capable of
producing 50 nanometer size features. This is complemented by all types
of deposition equipment; such as thermal evaporators, electron-beam
evaporators, a sputtering unit, chemical vapor deposition, and an atomic
monolayer deposition system.
Analytical and measurement tools include a profilometer and
ellipsometer, and optical and electron microscopes. More information can be found on
the clean room website: